IDiyas

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10854815 B1

PDFFull Text
Date of Patent:
Dec. 01, 2020

Filed:

May. 30, 2019

Method and apparatus for manufacturing display apparatus

Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Sangjin Han, Yongin-si, KR;

Junha Park, Yongin-si, KR;

Eugene Kang, Yongin-si, KR;

Dongwook Kim, Yongin-si, KR;

Cheollae Roh, Yongin-si, KR;

Jaewan Seol, Yongin-si, KR;

Seongho Jeong, Yongin-si, KR;

Myungsoo Huh, Yongin-si, KR;

Mingyu Seo, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:

Lewis Roca Rothgerber Christie LLP

Primary Examiner:

Nikolay K Yushin

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 27/00 (2006.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); C23C 14/54 (2006.01); H01L 21/66 (2006.01); H01L 27/32 (2006.01); H01L 51/56 (2006.01); H01L 51/50 (2006.01);
U.S. Cl.
CPC ...
H01L 51/001 (2013.01); C23C 14/042 (2013.01); C23C 14/24 (2013.01); C23C 14/54 (2013.01); H01L 22/10 (2013.01); H01L 27/3244 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01); H01L 51/5012 (2013.01); H01L 51/5056 (2013.01); H01L 51/5072 (2013.01); H01L 51/5088 (2013.01); H01L 51/5092 (2013.01); H01L 2227/323 (2013.01);
Abstract

An apparatus for manufacturing a display apparatus includes: a chamber; a plurality of source units outside the chamber, wherein the plurality of source units which accommodate a deposition material and transform the deposition material into gas; a nozzle unit in the chamber, wherein the nozzle unit is connected to the plurality of source units and injects, into the chamber, the deposition material supplied from one of the plurality of source units; and a regulating unit between each of the plurality of source units and the nozzle unit, wherein the regulating unit interrupts the deposition material supplied from each of the plurality of source units to the nozzle unit and selectively connects the plurality of source units with the nozzle unit.

Find Patent Forward Citations

Loading…