The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10854808 B1

PDF
Full Text
Expired
Date of Patent:
Dec. 01, 2020

Filed:

Oct. 19, 2015
Applicant:

Advanced Material Technologies, Inc., Chiba, JP;

Inventor:

Takeshi Kijima, Chiba, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01L 41/187 (2006.01); C23C 14/08 (2006.01); H01L 41/318 (2013.01); C23C 14/56 (2006.01); C23C 28/04 (2006.01); C23C 14/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); C23C 14/025 (2013.01); C23C 14/088 (2013.01); C23C 14/35 (2013.01); C23C 14/566 (2013.01); C23C 14/568 (2013.01); C23C 28/042 (2013.01); H01L 41/318 (2013.01);
Abstract

Ferroelectric ceramics including: a Pb(ZrTi)Oseed crystal film formed on a foundation film; and a Pb(ZrTi)Ocrystal film, wherein: the seed crystal film is formed by sputtering while the foundation film is being disposed on an upper side of a sputtering target and the foundation film is being made to face the sputtering target; in the seed crystal film, a Zr/Ti ratio on the crystal film side from the center in the thickness direction thereof is larger than a Zr/Ti ratio on the foundation film side from the center in the thickness direction thereof; the crystal film is crystallized by coating and heating a solution containing, in an organic solvent, a metal compound wholly or partially containing ingredient metals of the crystal film and a partial polycondensation product thereof; and the B and the x satisfy formulae 2 and 3, respectively, below,0.1<<1  formula 20.1<<1  formula 3.


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