The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2020
Filed:
Apr. 22, 2019
Applicant:
Macronix International Co., Ltd., Hsinchu, TW;
Inventor:
Chin-Cheng Yang, Kaohsiung, TW;
Assignee:
MACRONIX INTERNATIONAL CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 23/544 (2006.01); H01L 21/66 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 27/115 (2013.01); H01L 23/544 (2013.01); H01L 21/31105 (2013.01); H01L 22/20 (2013.01);
Abstract
Reference marks for forming a staircase structure are disposed along slit areas of a 3D memory structure, and slits of the 3D memory structure are formed on the slit areas. In a staircase area, the reference marks are formed by etching the topmost one of stacked layers, having a pair of a dielectric layer and a sacrificial layer, in a stacked structure.