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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10854497 B1

PDFFull Text
Date of Patent:
Dec. 01, 2020

Filed:

Feb. 26, 2018

Apparatus and method of selective turning over a row of substrates in an array of substrates in a processing system

Applicant:

Lawrence Chung-lai Lei, Milpitas, CA (US);

Inventor:

Lawrence Chung-Lai Lei, Milpitas, CA (US);

Assignee:

Other;

Attorney:

Vista IP Law Group, LLP

Primary Examiner:

Gregory W Adams

Int. Cl.
CPC ...
B65G 47/248 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68728 (2013.01); H01L 21/67778 (2013.01); B65G 47/248 (2013.01);
Abstract

A device for manipulating at least a first row of wafers and a second row of wafers, includes: a first holder configured to hold the first row of wafers, the first holder having a first rod and a second rod, the first rod and the second rod of the first holder defining a space therebetween for accommodating the first row of wafers, wherein a distance between the first rod and the second rod of the first holder is variable; and a second holder configured to hold the second row of wafers, the second holder having a first rod and a second rod, the first rod and the second rod of the second holder defining a space therebetween for accommodating the second row of wafers, wherein a distance between the first rod and the second rod of the second holder is variable.

Find Patent Forward Citations

Lei, Lawrence Chung-Lai. (2020). Apparatus and method of selective turning over a row of substrates in an array of substrates in a processing system (U.S. Patent No. 10854497). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10854497

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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