The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2020
Filed:
Mar. 18, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Jason M. Schaller, Austin, TX (US);
Michael Rohrer, Cedar Park, TX (US);
Tuan Anh Nguyen, San Jose, CA (US);
William Tyler Weaver, Austin, TX (US);
Gregory John Freeman, Austin, TX (US);
Robert Brent Vopat, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber. The method comprising orienting a supporting surface of a substrate support in a first orientation relative to an output surface of a showerhead, where the first orientation of the supporting surface relative to the output surface is not coplanar, and depositing a first layer of material on a substrate disposed on the supporting surface that is oriented in the first orientation.