The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2020
Filed:
Sep. 05, 2017
Applicants:
Centre National DE LA Recherche Scientifique, Paris, FR;
Universite Grenoble Alpes, Saint Martin d'Heres, FR;
Inventor:
Bernard Pelissier, Echirolles, FR;
Assignees:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris, FR;
UNIVERSITE GRENOBLE ALPES, Saint Martin d'Heres, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); H01L 21/67379 (2013.01); H01L 21/67389 (2013.01); H01L 21/67769 (2013.01);
Abstract
The invention relates to a method for the transportation and/or storage of at least one semiconductor plate, in which the plate is disposed in a hermetic container () filled with hydrogen at a pressure of between 10and 4*10Pa and, optionally, at least one inert gas, the total pressure in the casing being between 10and 5*10Pa.