The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2020

Filed:

Feb. 28, 2020
Applicant:

Recarbon, Inc., Santa Clara, CA (US);

Inventors:

George Stephen Leonard, III, Oakland, CA (US);

Stefan Andrew McClelland, San Jose, CA (US);

Jae Mo Koo, Palo Alto, CA (US);

Assignee:

RECARBON, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/511 (2006.01); H05H 1/46 (2006.01); G01J 1/04 (2006.01); G01J 1/42 (2006.01); B01J 19/12 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32229 (2013.01); B01J 19/12 (2013.01); C23C 16/511 (2013.01); G01J 1/0425 (2013.01); G01J 1/0492 (2013.01); G01J 1/429 (2013.01); G01J 1/4228 (2013.01); H01J 37/32449 (2013.01); H01J 37/32623 (2013.01); H01J 37/32844 (2013.01); H01J 37/32972 (2013.01); H05H 1/46 (2013.01); H01J 37/32192 (2013.01); H01J 37/32513 (2013.01); H01J 2237/1502 (2013.01); H05H 2001/469 (2013.01); H05H 2001/4622 (2013.01);
Abstract

A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity; and a recuperator directly attached to the adaptor and having a gas passageway that is in fluid communication with the gas outlet in the adaptor. The recuperator recovers heat energy from the exhaust gas and heats an input gas using the heat energy.


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