The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2020

Filed:

Jun. 26, 2018
Applicant:

Infineon Technologies Dresden Gmbh, Dresden, DE;

Inventors:

Erhard Landgraf, Dresden, DE;

Stephan Gerhard Albert, Munich, DE;

Steffen Bieselt, Stadt Wehlen, DE;

Sebastian Pregl, Dresden, DE;

Matthias Rose, Kirchseeon, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01L 9/12 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); B81B 3/0021 (2013.01); B81B 3/0086 (2013.01); B81C 1/00166 (2013.01); G01L 9/12 (2013.01); G01P 15/0802 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01); G01P 2015/088 (2013.01);
Abstract

A micromechanical sensor includes a first and a second capacitive sensor element each having a first and a second electrode, wherein electrode wall surfaces of the first electrode and the second electrode are situated opposite one another in a first direction and form a capacitance, wherein the first electrodes are movable in a second direction, which is different than the first direction, in response to a variable to be detected, and the second electrodes are stationary. The electrode wall surface of the first electrode of the first sensor element has a smaller extent in the second direction than the opposite electrode wall surface of the second electrode of the first sensor element. The electrode wall surface of the second electrode of the second sensor element has a smaller extent in the second direction than the opposite electrode wall surface of the first electrode of the second sensor element.


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