The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2020

Filed:

Mar. 29, 2018
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Takaki Sugino, Tokyo, JP;

Shinichi Hosomi, Tokyo, JP;

Takafumi Hara, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); G01J 5/08 (2006.01); G01J 5/04 (2006.01); H01L 31/18 (2006.01); G01J 5/02 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0803 (2013.01); G01J 5/023 (2013.01); G01J 5/024 (2013.01); G01J 5/046 (2013.01); G01J 5/048 (2013.01); G01J 5/20 (2013.01); H01L 31/1892 (2013.01); G01J 2005/202 (2013.01);
Abstract

An infrared sensor includes a supporting body having supporting body metal wiring that allows infrared rays to pass through. The supporting body is provided so as to cover one portion of an infrared detecting portion in a different plane spatially separated from that of the infrared detecting portion. The supporting body metal wiring disposed in an interior of the supporting body is such that one portion of a cobalt iron film is oxidized by a plasma discharge being carried out in an oxygen atmosphere. According to this kind of structure, infrared rays pass through the supporting body, and are absorbed by the infrared detecting portion, because of which there is no need to provide an infrared absorption layer in an upper layer of the supporting body.


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