The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2020

Filed:

Nov. 02, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Sayaka Yamasaki, Suwa, JP;

Hiroaki Tamura, Shimosuwa-machi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A61B 8/00 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/312 (2013.01); A61B 8/08 (2006.01); A61B 8/14 (2006.01); B06B 1/06 (2006.01); H01L 41/113 (2006.01); H01L 41/187 (2006.01); H01L 41/27 (2013.01);
U.S. Cl.
CPC ...
A61B 8/4494 (2013.01); A61B 8/0891 (2013.01); A61B 8/14 (2013.01); A61B 8/42 (2013.01); A61B 8/4427 (2013.01); A61B 8/4444 (2013.01); A61B 8/467 (2013.01); B06B 1/0644 (2013.01); H01L 41/081 (2013.01); H01L 41/0805 (2013.01); H01L 41/0933 (2013.01); H01L 41/1132 (2013.01); H01L 41/1876 (2013.01); H01L 41/27 (2013.01); H01L 41/312 (2013.01);
Abstract

A piezoelectric element includes: a piezoelectric body; and a vibrating plate including single crystal silicon having anisotropy having orientation with a relatively high Young's modulus and orientation with a relatively low Young's modulus (hereinafter, referred to as 'low Young's modulus orientation') as a vibrating material, in which the piezoelectric body and the vibrating plate are laminated on each other so that the low Young's modulus orientation is in a direction along a high expansion and contraction direction among a direction where a degree of expansion and contraction caused according to a support structure of the piezoelectric body is relatively high (hereinafter, referred to as 'high expansion and contraction direction') and a direction where a degree thereof is relatively low.


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