The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Mar. 14, 2019
Cree, Inc., Durham, NC (US);
Shadi Sabri, Cary, NC (US);
Daniel Lichtenwalner, Raleigh, NC (US);
Edward Robert Van Brunt, Raleigh, NC (US);
Scott Thomas Allen, Apex, NC (US);
Brett Hull, Raleigh, NC (US);
Cree, Inc., Hickory, NC (US);
Abstract
Semiconductor devices include a plurality of gate fingers extending on a wide bandgap semiconductor layer structure. An inter-metal dielectric pattern is formed on the gate fingers, the inter-metal dielectric pattern including a plurality of dielectric fingers that cover the respective gate fingers. A top-side metallization is provided on the inter-metal dielectric pattern and on exposed portions of the upper surface of the wide bandgap semiconductor layer structure. The top-side metallization includes a first conductive diffusion barrier layer on the inter-metal dielectric pattern and on the exposed portions of the upper surface of the wide bandgap semiconductor layer structure, a conductive contact layer on an upper surface of the first conductive diffusion barrier layer, and a grain stop layer buried within the conductive contact layer.