Method for fabricating high-efficiency micro-led module

Abstract

Disclosed is a method for fabricating a high-efficiency micro-LED module. The method includes: preparing a micro-LED in which an epilayer is grown on a sapphire substrate, a plurality of LED cells are formed on the epilayer, a plurality of individual electrode pads are disposed such that one individual electrode pad is assigned to each LED cell, and a common electrode pad is formed on an area surrounding the plurality of LED cells; preparing a submount substrate including a plurality of individual electrodes corresponding to the individual electrode pads and a common electrode corresponding to the common electrode pad; mounting the micro-LED on the submount substrate such that the plurality of individual electrodes are connected to the plurality of individual electrode pads and the common electrode pad is connected to the common electrode through a plurality of bonding connection members; forming a buffer layer between the micro-LED and the submount substrate; and irradiating a laser around the boundary between the sapphire substrate and the epilayer to separate the sapphire substrate from the epilayer, wherein the buffer layer absorbs energy produced by the laser at least between the neighboring LED cells to protect the epilayer or the surmount substrate from damage.