The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Oct. 23, 2018
Applicant:
Fujitsu Limited, Kawasaki, JP;
Inventor:
Akio Kawabata, Kawasaki, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/367 (2006.01); B82Y 30/00 (2011.01); H01L 23/373 (2006.01); C01B 32/162 (2017.01); C01B 32/184 (2017.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 23/3677 (2013.01); B82Y 30/00 (2013.01); C01B 32/162 (2017.08); C01B 32/184 (2017.08); H01L 23/373 (2013.01); B82Y 40/00 (2013.01); C01B 2202/08 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A CNT-metal composite structure is formed by forming a plurality of CNTs which stand side by side from a base substance, forming a sheet-shaped support film which covers upper ends of the CNTs, and filling gaps each present between adjacent ones of the CNTs with a metal. By this structure, highly reliable bonding sheet and heat dissipation mechanism which are very excellent in heat dissipation efficiency, and manufacturing methods of these are realized.