The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Apr. 04, 2017
Applicant:
Fabmatics Gmbh, Dresden, DE;
Inventors:
Assignee:
Fabmatics GmbH, Dresden, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 31/02 (2006.01); H01L 21/673 (2006.01); G05D 7/06 (2006.01); G01F 1/34 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); G05D 7/0635 (2013.01); H01L 21/67393 (2013.01); G01F 1/34 (2013.01); G01N 33/0036 (2013.01);
Abstract
A purge measuring system for front opening unified pods ('FOUPs') which are positioned in a FOUP nest. Along with at least one unoccupied/occupied sensor for the FOUP nest, at least one gas feed line and one gas discharge line for feeding and discharging flushing gas respectively is provided. At least one pressure sensor, a flowmeter and a regulator valve are arranged in each gas feed line. The valve is regulated based on the measuring results of pressure sensor and flowmeter. At least one moisture sensor and/or one oxygen sensor are arranged in each gas discharge line.