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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10845589 B1

PDFFull Text
Date of Patent:
Nov. 24, 2020

Filed:

Aug. 28, 2017

Optical apparatus, machining apparatus, and article manufacturing method

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Masaharu Kume, Utsunomiya, JP;

Yukihiro Inoue, Utsunomiya, JP;

Assignee:

CANON KABUSHIKI KAISHA, Tokyo, JP;

Attorney:

Canon U.S.A., Inc. IP Division

Primary Examiner:

Geoffrey S Evans

Int. Cl.
CPC ...
G02B 26/10 (2006.01); B23K 26/064 (2014.01); G02B 19/00 (2006.01); G02B 26/08 (2006.01); B23K 26/04 (2014.01); G02B 7/182 (2006.01); B23K 26/38 (2014.01); B23K 26/382 (2014.01); B23K 26/082 (2014.01); B23K 26/06 (2014.01); G02B 27/18 (2006.01); G02B 27/30 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 26/105 (2013.01); B23K 26/043 (2013.01); B23K 26/0643 (2013.01); B23K 26/082 (2015.10); B23K 26/38 (2013.01); B23K 26/382 (2015.10); G02B 7/1821 (2013.01); G02B 19/0019 (2013.01); G02B 19/0028 (2013.01); G02B 26/0816 (2013.01); G02B 26/101 (2013.01); G02B 27/18 (2013.01); G02B 27/30 (2013.01); G03F 7/70108 (2013.01);
Abstract

An optical apparatus includes a rotatable reflecting member including a first reflecting surface and a second reflecting surface, an optical system including a plurality of reflecting surfaces and configured to sequentially reflect light having been reflected at the first reflecting surface at the plurality of reflecting surfaces to make the light incident on the second reflecting surface, a driving part configured to change an angle of the reflecting member, a control unit configured to control the driving part to change a path of light emitted from the reflecting member after being reflected at the second reflecting surface, and a light incident portion configured to recognize a position of the light having been reflected at the first reflecting surface.

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