The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 2020

Filed:

Nov. 29, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Naoki Kohara, Kawasaki, JP;

Akira Yamamoto, Ageo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0032 (2013.01); G02B 21/0052 (2013.01); G02B 21/0056 (2013.01); G02B 21/0064 (2013.01); G02B 21/0076 (2013.01);
Abstract

A scanning microscope includes a scanning unit that causes irradiation light emitted by a light source to scan a sample, an optical system that guides the emitted light that has passed through the scanning unit to the sample, an isolation unit that includes a transmissive portion that enables the irradiation light to pass the transmissive portion and a reflective portion that reflects at least some of light that is included in emitted light generated from the sample as a result of the irradiation light being radiated to the sample and that has passed through the optical system and the scanning unit, and a detection unit that detects the emitted light that has passed through the isolation unit. The isolation unit is disposed in an optical path of the irradiation light between the light source and the scanning unit.


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