The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Aug. 19, 2016
Gwangju Institute of Science and Technology, Gwangju, KR;
Gunyoung Jung, Gwangju, KR;
Yusin Pak, Gwangju, KR;
Abstract
The present invention provides a method of manufacturing a hydrogen sensor and a hydrogen sensor manufactured thereby. Specifically, the method according to the present invention includes a step of forming a self-assembled single layer on a stamp substrate provided with nanoline-patterned uneven parts; a step of depositing a metal thin film layer on the self-assembled single layer; a step of disposing the stamp substrate on a flexible sensor substrate so that a polymer layer formed on the sensor substrate and the metal thin film layer deposited on the uneven parts are brought into contact with each other; a step of transferring a metal nanoribbon array having nanogaps to the sensor substrate by performing pressure and heat treatment on the stamp substrate and removing the stamp substrate; and a step of forming first and second electrodes on both ends of the transferred metal nanoribbon array.