The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Mar. 30, 2017
King Abdullah University of Science and Technology, Thuwal, SA;
KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY, Thuwal, SA;
Abstract
A sensing method includes operating a microelectromechanical system (MEMS) microbeam device; measuring structural vibrations of the MEMS microbeam device over time; selecting an operational frequency fthat is applied to the MEMS microbeam device, where the operational frequency fis different from a jump frequency fof the MEMS microbeam device, and the MEMS microbeam device is characterized by a frequency response curve that has a linear part and a softening or hardening part, and the operational frequency fis selected to be in the linear part; conducting an analysis of the structural vibrations of the MEMS microbeam device based on a linear equation that relates an amplitude of the structural vibrations to a frequency from the linear part; and detecting a frequency difference between the operational frequency fand the jump frequency fof the MEMS microbeam device based on the linear equation.