The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Oct. 31, 2018
Applicant:
Industry-university Cooperation Foundation Hanyang University Erica Campus, Ansan-si, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 20/10 (2006.01); B01J 23/42 (2006.01); B01J 23/44 (2006.01); H01J 7/18 (2006.01); H01L 23/26 (2006.01); B01J 21/08 (2006.01); B01J 35/00 (2006.01); B01J 37/34 (2006.01); B01J 20/02 (2006.01); B01J 20/30 (2006.01); B01J 35/02 (2006.01); B01J 20/06 (2006.01); B01J 20/32 (2006.01); B01J 37/00 (2006.01); B01J 37/02 (2006.01); G01J 5/04 (2006.01); B01J 23/50 (2006.01); G01J 1/02 (2006.01);
U.S. Cl.
CPC ...
B01J 20/103 (2013.01); B01J 20/02 (2013.01); B01J 20/0225 (2013.01); B01J 20/06 (2013.01); B01J 20/3071 (2013.01); B01J 20/3078 (2013.01); B01J 20/3204 (2013.01); B01J 20/3236 (2013.01); B01J 20/3289 (2013.01); B01J 21/08 (2013.01); B01J 23/42 (2013.01); B01J 23/44 (2013.01); B01J 35/002 (2013.01); B01J 35/023 (2013.01); B01J 35/026 (2013.01); B01J 37/0072 (2013.01); B01J 37/0215 (2013.01); B01J 37/347 (2013.01); B01J 37/348 (2013.01); H01J 7/18 (2013.01); H01L 23/26 (2013.01); B01J 23/50 (2013.01); G01J 5/045 (2013.01); G01J 2001/0276 (2013.01);
Abstract
A moisture and hydrogen adsorption getter is provided. The moisture and hydrogen adsorption getter includes a silicon substrate including a concave portion and a convex portion, a silicon oxide layer conformally provided along a surface of the concave portion and a surface of the convex portion and configured to adsorb moisture, and a hydrogen adsorption pattern disposed on the silicon oxide layer. A portion of the silicon oxide layer is exposed between portions of the hydrogen adsorption pattern.