The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Aug. 23, 2018
Resonant Inc., Santa Barbara, CA (US);
Sean McHugh, Santa Barbara, CA (US);
Patrick Turner, San Bruno, CA (US);
Ventsislav Yantchev, Sofia, BG;
Filip Iliev, Oakland, CA (US);
Resonant Inc., Goleta, CA (US);
Abstract
Surface acoustic wave (SAW) resonator, SAW filters, and methods of fabricating SAW filters. A first plurality of parallel conductors extending from a first bus bar are formed on a surface of a 128-degree Y-cut lithium niobate substrate. A second plurality of parallel conductors extending from a second bus bar are formed on the surface of the substrate, the second plurality of parallel conductors interleaved with the first plurality of parallel conductors. An SiO2 layer overlays the first and second pluralities of parallel conductors. The first and second pluralities of parallel conductors are substantially copper and have a thickness Ddefined by 0.12P≤D≤0.24P, where P is a center-to-center spacing of adjacent parallel conductors. The SiO2 layer has a thickness Ddefined by 3.1D≤D≤4.5D.