The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2020

Filed:

Aug. 22, 2018
Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventors:

Masaharu Mizutani, Yokkaichi Mie, JP;

Yoichi Minemura, Yokkaichi Mie, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 29/78 (2006.01); H01L 27/11568 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 27/11568 (2013.01); H01L 29/7827 (2013.01);
Abstract

A semiconductor device includes a base, a stacked body, a plate-shaped portion, and first to third columnar portions. The stacked body is provided over the base. The plate-shaped portion is inside the stacked body from an upper end of the stacked body to the base. The first to third columnar portions are inside the stacked body from the upper end of the stacked body to the base. The second columnar portion is located away from the first columnar portion in a first direction. The third columnar portion is aligned with the first columnar portion and the second columnar portion in the first direction. A pitch between the third columnar portion and the first columnar portion is a first pitch. A pitch between the third columnar portion and the second columnar portion is a second pitch larger than the first pitch.


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