The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2020

Filed:

Jun. 18, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jun-hyeok Ahn, Hwaseong-si, KR;

Myeong-dong Lee, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/768 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76243 (2013.01); H01L 21/7687 (2013.01); H01L 21/76224 (2013.01); H01L 27/10885 (2013.01); H01L 27/10891 (2013.01);
Abstract

An integrated circuit (IC) device including a line structure including a conductive line formed on a substrate and a lower insulation capping pattern; an insulation spacer covering a sidewall of the line structure; a conductive plug spaced apart from the conductive line in a first horizontal direction; a lower insulation fence spaced apart from the conductive line in the first horizontal direction, the lower insulation fence having a sidewall that contacts the conductive plug; and an upper insulation fence including a first portion covering the lower insulation capping pattern and a second portion covering the lower insulation fence, wherein a width of the second portion in a second horizontal direction perpendicular to the first horizontal direction is different from a width of the lower insulation fence in the second horizontal direction.


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