The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Nov. 21, 2017
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventor:
Heungyeol Na, Yongin-si, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B24B 37/34 (2012.01); B24B 37/10 (2012.01); H01L 21/306 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); B24B 37/10 (2013.01); B24B 37/345 (2013.01); H01L 21/30625 (2013.01); H01L 21/6838 (2013.01);
Abstract
A substrate treatment method performed by a substrate treatment device includes placing a substrate on a stage, treating the substrate placed on the stage; and detaching a treated substrate from a stage. Detaching the treated substrate includes pushing the substrate with a lift pin in a direction away from the stage, and ejecting fluid through a fluid ejection unit onto the substrate in a direction away from the stage.