The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2020

Filed:

Feb. 28, 2020
Applicant:

Recarbon, Inc., Santa Clara, CA (US);

Inventors:

George Stephen Leonard, III, Oakland, CA (US);

Stefan Andrew McClelland, San Jose, CA (US);

Curtis Peter Tom, San Mateo, CA (US);

Assignee:

RECARBON, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/511 (2006.01); H05H 1/46 (2006.01); G01J 1/04 (2006.01); G01J 1/42 (2006.01); B01J 19/12 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32229 (2013.01); B01J 19/12 (2013.01); C23C 16/511 (2013.01); G01J 1/0425 (2013.01); G01J 1/0492 (2013.01); G01J 1/429 (2013.01); G01J 1/4228 (2013.01); H01J 37/32449 (2013.01); H01J 37/32623 (2013.01); H01J 37/32844 (2013.01); H01J 37/32972 (2013.01); H05H 1/46 (2013.01); H01J 37/32192 (2013.01); H01J 37/32513 (2013.01); H01J 2237/1502 (2013.01); H05H 2001/469 (2013.01); H05H 2001/4622 (2013.01);
Abstract

The present invention provides a plasma generating system that includes: a plasma cavity for generating a plasma therewithin by use of microwave energy; an adaptor electrically grounded and having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity; and an ignition device mounted on the adaptor. The ignition device includes: a first electrode electrically grounded; and a second electrode electrically floating and configured to convert a portion of the microwave energy into an electrostatic discharge to thereby develop a voltage difference between the first and second electrodes, where the voltage difference generates a spark discharge between the first electrode and the second electrode to create the plasma.


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