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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10837113 B1

PDFFull Text
Expired
Date of Patent:
Nov. 17, 2020

Filed:

Mar. 12, 2018

Shower head, processing apparatus, and shower plate

Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Satoshi Tsuno, Taito, JP;

Masashi Yamage, Yokohama, JP;

Assignee:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Rudy Zervigon

Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23C 16/52 (2006.01); C23C 16/513 (2006.01); B05B 13/02 (2006.01); B05B 1/18 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01); C23C 16/509 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); B05B 1/185 (2013.01); B05B 13/02 (2013.01); C23C 16/45565 (2013.01); C23C 16/509 (2013.01); C23C 16/513 (2013.01); H01J 37/3244 (2013.01); H01J 37/3266 (2013.01); H01J 37/32422 (2013.01);
Abstract

According to one embodiment, a shower head includes a head and a magnetic field generator. The head includes a first surface, a second surface opposite to the first surface, an internal compartment, and a plurality of holes. Each of the holes is open to the first surface and to the second surface that faces the compartment, and communicates with the compartment. The magnetic field generator generates a magnetic field inside the holes between the first surface and the second surface.

Find Patent Forward Citations

Tsuno, Satoshi. (2020). Shower head, processing apparatus, and shower plate (U.S. Patent No. 10837113). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10837113

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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