The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Jan. 03, 2019
Applicant:
Seagate Technology Llc, Cupertino, CA (US);
Inventors:
Sameh Hassan, Londonderry, GB;
Marcus Ormston, Londonderry, GB;
Emeline Hassen, Londonderry, GB;
Gabriel McCafferty, Londonderry, GB;
Assignee:
SEAGATE TECHNOLOGY LLC, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/458 (2006.01); C23C 16/56 (2006.01); G11B 5/21 (2006.01);
U.S. Cl.
CPC ...
C23C 16/403 (2013.01); C23C 16/4583 (2013.01); C23C 16/56 (2013.01); G11B 5/21 (2013.01);
Abstract
A multi-layer barrier and method of formation. The method includes applying oxidation to a top of a reference layer, and depositing a plurality of different metal layers over the reference layer. The method also includes providing different oxidation doses at different temperatures to different layers of the plurality of metal layers. The method further includes performing an annealing operation after depositing at least two of the plurality of different metal layers.