Ultrasound transducer device and method of manufacturing the same

Abstract

The present invention relates to an ultrasound transducer device comprising at least one cMUT cell () for transmitting and/or receiving ultrasound waves, the cMUT cell () comprising a cell membrane () and a cavity () underneath the cell membrane. The device further comprises a substrate () having a first side () and a second side (), the at least one cMUT cell () arranged on the first side () of the substrate (). The substrate () comprises a substrate base layer () and a plurality of adjacent trenches () extending into the substrate () in a direction orthogonal to the substrate sides (), wherein spacers () are each formed between adjacent trenches (). The substrate () further comprises a connecting cavity () which connects the trenches () and which extends in a direction parallel to the substrate sides (), the trenches () and the connecting cavity () together forming a substrate cavity () in the substrate (). The substrate () further comprises a substrate membrane () covering the substrate cavity (). The substrate cavity () is located in a region of the substrate () underneath the cMUT cell (). The present invention further relates to a method of manufacturing such ultrasound transducer device.