The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Oct. 31, 2017
The Japan Steel Works, Ltd., Tokyo, JP;
Keisuke Washio, Kanagawa, JP;
Tatsuya Matsumoto, Kanagawa, JP;
Takashi Ebisawa, Kanagawa, JP;
Junichi Shida, Kanagawa, JP;
THE JAPAN STEEL WORKS, LTD., Tokyo, JP;
Abstract
A method of manufacturing a display apparatus having an organic EL element includes: a step of forming the organic EL element over a substrate made of a flexible substrate; and a step of forming a protecting filmmade of an inorganic insulating material so as to cover the organic EL element by using an ALD method. In the step of forming the protecting film, the protecting filmis formed by alternately performing a step of forming a high-density layerH by using an ALD method and a step of forming, by using an ALD method, a low-density layerL that has the same constituent element as the high-density layerH and has a lower density than the high-density layerH. The protecting filmhas a layered structure made of one or more high-density layersH and one or more low-density layersL so that the low-density layerL and the high-density layerH are alternately layered so as to be in contact with each other.