The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Feb. 02, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); B41J 2/045 (2006.01); B41J 2/16 (2006.01); B41J 2/14 (2006.01); H01L 41/317 (2013.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); B41J 2/04 (2006.01); B41J 2/15 (2006.01);
U.S. Cl.
CPC ...
H01L 41/047 (2013.01); B41J 2/04581 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1632 (2013.01); B41J 2/1635 (2013.01); B41J 2/1642 (2013.01); B41J 2/1645 (2013.01); B41J 2/1646 (2013.01); H01L 41/0815 (2013.01); H01L 41/0973 (2013.01); H01L 41/317 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14419 (2013.01);
Abstract
A piezoelectric element having a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, in which a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and a total thickness Tof the vibrating plate and the first electrode and a total thickness Tof the piezoelectric layer and the second electrode have a relationship of T≥T.