The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

Jan. 14, 2019
Applicant:

Newport Fab, Llc, Newport Beach, CA (US);

Inventors:

Nabil El-Hinnawy, Irvine, CA (US);

Gregory P. Slovin, Irvine, CA (US);

Jefferson E. Rose, Hawthorne, CA (US);

David J. Howard, Irvine, CA (US);

Assignee:

Newport Fab, LLC dba Jazz Semiconductor, Newport Beach, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 23/66 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5223 (2013.01); H01L 23/66 (2013.01); H01L 45/06 (2013.01); H01L 45/126 (2013.01); H01L 45/1226 (2013.01); H01L 45/143 (2013.01); H01L 45/144 (2013.01);
Abstract

A capacitive tuning circuit includes radio frequency (RF) switches connected to an RF line. Each RF switch includes a phase-change material (PCM), a heating element underlying an active segment of the PCM and extending outward and transverse to the PCM, and RF terminals having lower metal portions and upper metal portions. Alternatively, the RF terminals can have a trench metal liner separated from a trench metal plug by a dielectric liner. At least one capacitor is formed in part by at least one of the lower metal portions, upper metal portions, or trench metal liner. The capacitive tuning circuit can be set to a desired capacitance value when a first group of the RF switches is in an OFF state and a second group of the RF switches is in an ON state.


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