The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Dec. 21, 2016
Institute of Microelectronics, Chinese Academy of Sciences, Beijing, CN;
Abstract
A semiconductor arrangement includes: a substrate; a plurality of fins formed on the substrate and extending in a first direction; a plurality of gate stacks formed on the substrate and extending in a second direction crossing the first direction and dummy gates composed of dielectric and extending in the second direction, wherein each of the gate stacks intersects at least one of the fins; and spacers formed on sidewalls of the gate stacks and sidewalls of the dummy gates, wherein spacers of at least a first one and a second one among the gate stacks and the dummy gates which are aligned in the second direction extend integrally, and at least some of the fins have ends abutting the dummy gates and substantially aligned with inner walls of corresponding ones of the spacers.