The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

Aug. 08, 2018
Applicant:

X Display Company Technology Limited, Dublin, IE;

Inventors:

Christopher Andrew Bower, Raleigh, NC (US);

Matthew Meitl, Durham, NC (US);

Salvatore Bonafede, Chapel Hill, NC (US);

Brook Raymond, Cary, NC (US);

Carl Ray Prevatte, Jr., Raleigh, NC (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/18 (2006.01); H01L 21/683 (2006.01); B41F 16/00 (2006.01); H01L 21/67 (2006.01); H01L 33/00 (2010.01); H01L 27/15 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); B41F 16/00 (2013.01); H01L 21/67144 (2013.01); H01L 33/0093 (2020.05); H01L 33/0095 (2013.01); H01L 27/15 (2013.01); H01L 2221/68359 (2013.01); H01L 2221/68363 (2013.01); H01L 2221/68381 (2013.01);
Abstract

An exemplary wafer structure comprises a source wafer having a patterned sacrificial layer defining anchor portions separating sacrificial portions. A patterned device layer is disposed on or over the patterned sacrificial layer, forming a device anchor on each of the anchor portions. One or more devices are disposed in the patterned device layer, each device disposed entirely over a corresponding one of the one or more sacrificial portions and spatially separated from the one or more device anchors. A tether structure connects each device to a device anchor. The tether structure comprises a tether device portion disposed on or over the device, a tether anchor portion disposed on or over the device anchor, and a tether connecting the tether device portion to the tether anchor portion. The tether is disposed at least partly in the patterned device layer between the device and the device anchor.


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