The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Jan. 03, 2018
Asm Ip Holding B.v., Almere, NL;
Fred Pettinger, Phoenix, AZ (US);
Carl White, Phoenix, AZ (US);
Dave Marquardt, Gilbert, AZ (US);
Sokol Ibrani, Phoenix, AZ (US);
Eric Shero, Phoenix, AZ (US);
Todd Dunn, Phoenix, AZ (US);
Kyle Fondurulia, Phoenix, AZ (US);
Mike Halpin, Phoenix, AZ (US);
ASM IP Holding B.V., Almere, NL;
Abstract
Embodiments related to managing the process feed conditions for a semiconductor process module are provided. In one example, a gas channel plate for a semiconductor process module is provided. The example gas channel plate includes a heat exchange surface including a plurality of heat exchange structures separated from one another by intervening gaps. The example gas channel plate also includes a heat exchange fluid director plate support surface for supporting a heat exchange fluid director plate above the plurality of heat exchange structures so that at least a portion of the plurality of heat exchange structures are spaced from the heat exchange fluid director plate.