The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2020
Filed:
Mar. 26, 2019
Applicant:
Hitachi High-tech Science Corporation, Tokyo, JP;
Inventors:
Masato Suzuki, Tokyo, JP;
Satoshi Tomimatsu, Tokyo, JP;
Makoto Sato, Tokyo, JP;
Tatsuya Asahata, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH SCIENCE CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/305 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3053 (2013.01); H01J 37/20 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/20285 (2013.01);
Abstract
To automatically repeat an operation of isolating a sample piece, which is formed by processing a sample with an ion beam, and transferring the sample piece to a sample piece holder, a charged particle beam device includes a computer configured to perform control so that, without rotating a needle with which the sample piece is fixed to the sample piece holder, a deposition film deposited on the needle is irradiated with a charged particle beam from a charged particle beam irradiation optical system.