The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

Jan. 16, 2020
Applicant:

Nichia Corporation, Anan, JP;

Inventor:

Naoki Musashi, Anan, JP;

Assignee:

NICHIA CORPORATION, Anan, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); C03C 15/00 (2006.01); G03F 7/32 (2006.01); G03F 7/36 (2006.01); H01L 33/58 (2010.01);
U.S. Cl.
CPC ...
G03F 7/0005 (2013.01); C03C 15/00 (2013.01); G03F 7/32 (2013.01); G03F 7/36 (2013.01); H01L 33/58 (2013.01); H01L 2933/0058 (2013.01);
Abstract

A method for manufacturing an optical member includes: forming a mask pattern on a glass member, the mask pattern comprising oxygen and indium; performing dry etching on the glass member using the mask pattern as a mask, while using an etching gas comprising fluorine; after performing the dry etching, performing wet etching on the glass member using the mask pattern as a mask, while using an etching solution comprising fluorine; and after alternately repeating performing the dry etching and the wet etching a plurality of times, removing the mask pattern.


Find Patent Forward Citations

Musashi, Naoki. (2020). Method for manufacturing optical member (U.S. Patent No. 10831099). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10831099

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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