The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

Feb. 14, 2017
Applicant:

Seagate Technology Llc, Cupertino, CA (US);

Inventors:

Sang-Min Park, San Jose, CA (US);

Nobuo Kurataka, Campbell, CA (US);

Gennady Gauzner, San Jose, CA (US);

Assignee:

SEAGATE TECHNOLOGY LLC, Fremont, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); G03F 7/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); B29C 33/62 (2006.01); B29C 59/02 (2006.01); B05D 1/26 (2006.01); B05D 3/10 (2006.01); B29L 9/00 (2006.01); B29L 31/00 (2006.01);
U.S. Cl.
CPC ...
B05D 3/12 (2013.01); B05D 1/26 (2013.01); B29C 33/62 (2013.01); B29C 59/022 (2013.01); B29C 59/026 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01); B05D 3/10 (2013.01); B29C 2059/023 (2013.01); B29K 2883/00 (2013.01); B29K 2909/14 (2013.01); B29L 2009/005 (2013.01); B29L 2031/756 (2013.01); Y10T 428/24802 (2015.01);
Abstract

A pattern imprint template incudes a patterned recesses and a layer formed over the patterned recesses. The pattern recesses form a pattern in a resist when brought in contact with a substrate with a resist thereon. The layer formed over the patterned recesses has a first surface energy. The first surface energy is lower in comparison to a second surface energy of the substrate with the resist thereon. The lower first surface energy in comparison to the second surface energy of the substrate avoids trapping gas in the resist by pushing gas toward the imprint template for venting through the patterned recesses.


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