The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

Nov. 01, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Sayaka Yamasaki, Suwa, JP;

Hiroaki Tamura, Shimosuwa-machi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); A61B 8/00 (2006.01); H01L 41/113 (2006.01); G01P 15/09 (2006.01); H02N 2/18 (2006.01); B06B 1/06 (2006.01); H01L 41/04 (2006.01); H01L 41/083 (2006.01); H01L 41/187 (2006.01); H01L 41/257 (2013.01); H01L 41/29 (2013.01); H01L 41/312 (2013.01);
U.S. Cl.
CPC ...
A61B 8/4494 (2013.01); A61B 8/4444 (2013.01); B06B 1/06 (2013.01); B06B 1/0607 (2013.01); G01P 15/09 (2013.01); G01P 15/0922 (2013.01); H01L 41/04 (2013.01); H01L 41/081 (2013.01); H01L 41/083 (2013.01); H01L 41/0825 (2013.01); H01L 41/1136 (2013.01); H01L 41/1876 (2013.01); H01L 41/257 (2013.01); H01L 41/29 (2013.01); H01L 41/312 (2013.01); H02N 2/186 (2013.01);
Abstract

A piezoelectric element includes: a piezoelectric body; and a vibrating plate including single crystal silicon having anisotropy having orientation with a relatively high Poisson's ratio and orientation with a relatively low Poisson's ratio (hereinafter, referred to as 'low Poisson's ratio orientation') as a vibrating material, in which the piezoelectric body and the vibrating plate are laminated on each other so that the low Poisson's ratio orientation is in a direction along a high expansion and contraction direction among a direction where a degree of expansion and contraction caused according to a support structure of the piezoelectric body is relatively high (hereinafter, referred to as 'high expansion and contraction direction') and a direction where a degree thereof is relatively low.


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