The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Aug. 28, 2017
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/12 (2006.01); H01L 41/083 (2006.01); H01L 41/187 (2006.01); H01L 41/27 (2013.01); H01L 41/047 (2006.01); H02N 2/00 (2006.01); H01L 41/08 (2006.01); H02N 2/10 (2006.01); F04B 17/00 (2006.01); F04B 43/09 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0475 (2013.01); B25J 9/12 (2013.01); F04B 17/003 (2013.01); F04B 43/095 (2013.01); H01L 41/0477 (2013.01); H01L 41/083 (2013.01); H01L 41/0805 (2013.01); H01L 41/187 (2013.01); H01L 41/27 (2013.01); H02N 2/004 (2013.01); H02N 2/103 (2013.01);
Abstract
A piezoelectric element includes: a substrate; a first electrode which is disposed on the substrate; a piezoelectric body layer which is disposed on the first electrode, which has a plurality of layers configured to contain a piezoelectric body material, and in which the total thickness of the plurality of layers is within a range of 1.6 μm to 10 μm; and an intermediate layer which is disposed on an interlayer of the piezoelectric body layer, and which is configured to contain titanium.