The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2020

Filed:

May. 13, 2016
Applicant:

Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;

Inventors:

Yuta Urano, Tokyo, JP;

Kaifeng Zhang, Tokyo, JP;

Yoshiki Matoba, Tokyo, JP;

Akihiro Takeda, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/10 (2018.01); G01N 23/18 (2018.01); G01N 23/083 (2018.01); G01N 23/16 (2018.01); G01N 23/04 (2018.01);
U.S. Cl.
CPC ...
G01N 23/10 (2013.01); G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/16 (2013.01); G01N 23/18 (2013.01); G01N 2223/60 (2013.01);
Abstract

Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.


Find Patent Forward Citations

Loading…