The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Apr. 18, 2018
Applicant:
Rosemount Aerospace Inc., Burnsville, MN (US);
Inventor:
Jun Zheng, Edina, MN (US);
Assignee:
Rosemount Aerospace Inc., Burnsville, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 19/06 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 19/0681 (2013.01); B81B 7/0019 (2013.01); B81C 1/00158 (2013.01); G01L 9/0048 (2013.01); G01L 9/0073 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0132 (2013.01); B81C 2203/031 (2013.01); B81C 2203/036 (2013.01);
Abstract
A MEMS pressure sensor includes a first plate with a hole on a diaphragm bonded to the first plate around its rim with the diaphragm positioned over the hole. An isolation frame is bonded to the diaphragm and a second plate with a pillar is bonded to the isolation frame around its rim to form a cavity such that the end of the pillar in the cavity is proximate a surface of the diaphragm. The diaphragm and second plate form a capacitive sensor which changes output upon deflection of the diaphragm relative to the second plate.