The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Feb. 28, 2017
Applicant:
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Inventors:
Assignee:
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/01 (2006.01); C04B 35/64 (2006.01); C04B 41/00 (2006.01); C04B 41/80 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01); C23C 14/34 (2006.01); C23C 14/08 (2006.01); H01J 37/34 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
C04B 35/01 (2013.01); C04B 35/64 (2013.01); C04B 41/009 (2013.01); C04B 41/0072 (2013.01); C04B 41/80 (2013.01); C23C 14/086 (2013.01); C23C 14/34 (2013.01); C23C 14/3407 (2013.01); H01J 37/3426 (2013.01); H01L 21/02631 (2013.01); H01L 29/66969 (2013.01); H01L 29/786 (2013.01); H01L 29/7869 (2013.01); C04B 2235/40 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6583 (2013.01); H01L 21/02565 (2013.01);
Abstract
There are provided an oxide sintered material containing an InOcrystal phase, a ZnInOcrystal phase and a ZnWOcrystal phase, and a method of producing the oxide sintered material. The method includes forming the oxide sintered material by sintering a molded body containing In, W and Zn, and forming the oxide sintered material including placing the molded body at a first constant temperature selected from a temperature range of 500° C. or more and 1000° C. or less for 30 minutes or longer.