The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Aug. 24, 2016
Linde Aktiengesellschaft, Munich, DE;
Derrick Ernest Hilton, Cobham, GB;
Christopher Rand, East Clandon, GB;
LINDE AKTIENGESELLSCHAFT, Munich, DE;
Abstract
A sensor module for connection between a fabrication tool and the head of the fabrication tool. The sensor module has an interface connectable to the fabrication tool, having: a power port for receiving power transmitted by the fabrication tool to the head, a gas port for receiving gas delivered by the fabrication tool to the head, and another interface connectable to the head which has another power port for delivering power to the head, another gas port for delivering gas, from the first gas port, to the head. The module also has a sensor module having a memory, a sensor for measuring power transmitted to the head, another sensor for measuring the gas delivered to the head, a device for transmitting information between the sensor module and a remote location, and a processor electronically connected to the memory, transmission device, and sensors.