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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10821483 B1

PDFFull Text
Date of Patent:
Nov. 03, 2020

Filed:

Sep. 13, 2017

Substrate treatment apparatus

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Wataru Yano, Kyoto, JP;

Akio Hashizume, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd., Kyoto, JP;

Attorney:

Ostrolenk Faber LLP

Primary Examiner:

Joseph J Hail

Assistant Examiner:

J Stephen Taylor

Int. Cl.
CPC ...
B08B 1/04 (2006.01); H01L 21/02 (2006.01); A46B 5/00 (2006.01); A46B 9/00 (2006.01); A46B 13/04 (2006.01); A46B 15/00 (2006.01); B08B 1/00 (2006.01); B08B 3/08 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B08B 1/04 (2013.01); A46B 5/0025 (2013.01); A46B 9/005 (2013.01); A46B 13/04 (2013.01); A46B 15/0004 (2013.01); B08B 1/002 (2013.01); B08B 1/007 (2013.01); B08B 3/08 (2013.01); H01L 21/67046 (2013.01); H01L 21/68764 (2013.01); A46B 2200/30 (2013.01);
Abstract

A substrate treatment apparatus includes a brush moving mechanism which moves a shaft to which a cleaning brush is attached. The brush body includes a substrate contact portion of a pillar-shaped portion. The substrate treatment apparatus further includes a correcting member and a relatively-positioning mechanism. When the correcting member is placed in a target position, a contact portion of the correcting member overlaps an object portion which is a combination of a design contact portion and a belt-shaped annular portion in an outer surface of a design pillar-shaped portion of a design body of a design brush. The contact portion is formed to have an inverted shape of the object portion of the design brush, and a portion of the contact portion, which corresponds to the belt-shaped annular portion, is a center-axis facing surface which faces a center axis of the shaft.

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