The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Jan. 08, 2018
Applicant:
The Regents of the University of California, Oakland, CA (US);
Inventors:
Assignee:
The Regents of the University of California, Oakland, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); B06B 1/06 (2006.01); G01N 29/24 (2006.01); H01L 41/332 (2013.01);
U.S. Cl.
CPC ...
B06B 1/0666 (2013.01); G01N 29/2437 (2013.01); H01L 41/0973 (2013.01); H01L 41/332 (2013.01);
Abstract
A device includes a piezoelectric diaphragm positioned on a frame. A fixed portion of the diaphragm is fixed relative to the frame and an active portion of the diaphragm is not fixed relative to the frame. The active portion of the diaphragm surrounds the fixed portion of the diaphragm and/or has a boundary with a concave shape.