The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Jan. 12, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Phillip Criminale, Livermore, CA (US);
Steve E. Babayan, Los Altos, CA (US);
Scott Edmonson, San Jose, CA (US);
Phillip R. Sommer, Newark, CA (US);
Dan A. Marohl, San Jose, CA (US);
Chris Blank, Gilroy, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes generating, based on a process recipe, a first electrical control signal by a processing device external to a particular radio frequency (RF) environment. The method further includes converting the first electrical control signal into an alternative control signal, transmitting the alternative control signal to a converter within the particular RF environment over a non-conductive communication link, and converting the alternative control signal into a second electrical control signal by the converter. The method further includes controlling a first plurality of elements via one or more switching devices using the second electrical control signal. The method further includes generating, based on the process recipe, a third signal by the processing device and controlling a second plurality of elements disposed outside of the RF environment using the third signal. The first plurality of elements and the second plurality of elements are controlled substantially simultaneously based on the process recipe.