The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Jul. 14, 2016
Applicant:
Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Masanao Murata, Ise, JP;
Takashi Yamaji, Ise, JP;
Assignee:
MURATA MACHINERY, LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); G05D 7/0617 (2013.01);
Abstract
A purge device capable of appropriately purging a container while saving purge gas includes a first purge nozzle that supplies a purge gas to a container to be purged, an internal state detector capable of detecting an internal state of the container before a purging process with the first purge nozzle is started, and a purge determiner that determines purge conditions for the container based on a detection result from the internal state detector.