The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Jul. 19, 2018
SK Siltron Co., Ltd, Gumi-si, Gyeongsangbuk-do, KR;
Se Geun Ha, Gumi-si, KR;
SK SILTRON CO., LTD, , KR;
Abstract
The present invention relates to an apparatus of controlling a temperature of a wafer cleaning equipment capable of quickly and accurately determining a detection abnormality of a temperature sensor located inside a cleaning tank, and a method of controlling a temperature using the same. The apparatus of controlling a temperature of a wafer cleaning equipment and the method of controlling a temperature using the same according to the present invention may determine an abnormal operation of a first temperature sensor installed at an inner side of an inner tank by comparing a measurement value of the first temperature sensor installed at the inner side of the inner tank and a measurement value of a second temperature sensor installed at a transfer robot configured to transfer wafers to the inner side of the inner tank. Meanwhile, a method of controlling a temperature of a wafer cleaning equipment according to the present invention may determine an abnormal operation of temperature sensors by comparing measurement values of the temperature sensors installed at an inner side of each of inner tanks in a state of supplying deionized water of a set temperature to each of the inner tanks after discharging a cleaning solution accommodated in each of the inner tanks of a plurality of cleaning tanks.