The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2020

Filed:

Aug. 30, 2018
Applicant:

Keyence Corporation, Osaka, JP;

Inventors:

Jumpei Yamashita, Osaka, JP;

Takashi Nakatsukasa, Osaka, JP;

Assignee:

KEYENCE CORPORATION, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G02B 21/02 (2006.01); G02B 21/26 (2006.01); G02B 21/24 (2006.01); G02B 21/36 (2006.01); G02B 21/08 (2006.01); G06T 7/571 (2017.01);
U.S. Cl.
CPC ...
G02B 21/0032 (2013.01); G02B 21/006 (2013.01); G02B 21/008 (2013.01); G02B 21/02 (2013.01); G02B 21/084 (2013.01); G02B 21/244 (2013.01); G02B 21/26 (2013.01); G02B 21/367 (2013.01); G06T 7/571 (2017.01); G06T 2200/24 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/20221 (2013.01);
Abstract

When an observation target is enabled to be observed by a plurality of types of measuring methods having different principles, to make it possible switch an illuminating method in a plurality of ways to increase types of observation targets that can be observed. An observation target SP is illuminated by at least one of coaxial epi-illuminationand non-coaxial epi-illumination. A focus search is performed on the basis of an image acquired by a first light receiving element. The observation target SP is illuminated by a light source. The focus search is performed on the basis of a signal acquired by a second light receiving element


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