The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Feb. 20, 2017
Applicant:
Tosoh Corporation, Shunan-shi, JP;
Inventors:
Assignee:
TOSOH CORPORATION, Shunan-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); C23C 14/35 (2006.01); C04B 35/01 (2006.01); H01B 1/08 (2006.01); C23C 14/34 (2006.01); C03C 17/245 (2006.01); C04B 35/626 (2006.01); H01L 31/18 (2006.01); H01B 1/00 (2006.01); C04B 35/495 (2006.01); C04B 35/64 (2006.01); H01L 27/30 (2006.01); H01L 31/0224 (2006.01); H01L 31/0264 (2006.01); H01B 13/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C03C 17/245 (2013.01); C04B 35/01 (2013.01); C04B 35/495 (2013.01); C04B 35/6261 (2013.01); C04B 35/64 (2013.01); C23C 14/08 (2013.01); C23C 14/083 (2013.01); C23C 14/086 (2013.01); C23C 14/3414 (2013.01); C23C 14/35 (2013.01); H01B 1/00 (2013.01); H01B 1/08 (2013.01); H01B 13/0036 (2013.01); H01L 27/301 (2013.01); H01L 31/0224 (2013.01); H01L 31/0264 (2013.01); H01L 31/022425 (2013.01); H01L 31/022466 (2013.01); H01L 31/1884 (2013.01); H01L 31/1888 (2013.01); C03C 2217/23 (2013.01); C03C 2218/156 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3251 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/5427 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/602 (2013.01); C04B 2235/604 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6565 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6583 (2013.01); C04B 2235/662 (2013.01); C04B 2235/72 (2013.01); C04B 2235/77 (2013.01); C04B 2235/785 (2013.01); C04B 2235/786 (2013.01); C04B 2235/96 (2013.01); C04B 2235/963 (2013.01); C04B 2235/9646 (2013.01); C04B 2235/9653 (2013.01);
Abstract
An oxide sintered body containing indium, hafnium, tantalum, and oxygen as constituent elements, in which when indium, hafnium, and tantalum are designated as In, Hf, and Ta, respectively, the atomic ratio of Hf/(In+Hf+Ta) is equal to 0.002 to 0.030, and the atomic ratio of Ta/(In+Hf+Ta) is equal to 0.0002 to 0.013.