The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Jun. 19, 2019
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Masanori Mikoshiba, Suwa, JP;
Katsutomo Tsukahara, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); H01L 41/081 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14491 (2013.01); B41J 2202/03 (2013.01); B41J 2202/11 (2013.01);
Abstract
A liquid ejecting head including a vibration plate that forms a wall surface of a pressure chamber filled with a liquid; and a piezoelectric element that vibrates the vibration plate to eject the liquid in the pressure chamber from nozzles, in which the vibration plate includes a first layer formed of silicon oxide, a second layer formed of zirconium oxide on a side opposite to the pressure chamber when viewed from the first layer, a ratio of a film thickness of the second layer to a film thickness of the first layer is 0.16 or more, and the film thickness of the second layer is 300 nm or more.